许威，副教授，博士

办公室：致腾楼1016

E-mail：weixu@szu.edu.cn

电话：0755-26534853; +86-18928410278

ResearchGate学术主页：https://www.researchgate.net/profile/Wei_Xu163

Google Scholar学术主页：https://scholar.google.com/citations?user=XehX9rsAAAAJ&hl=en

许威，博士，深圳市孔雀计划海外高层次人才，IEEE高级会员，美国物理学会会员。2010年和2013年毕业于华中科技大学，获工学学士与工学硕士学位。2017年毕业于香港科技大学，获博士学位，后于香港科技大学集成微系统MEMS实验室担任副研究员。2018年加入365游戏大厅，现任长聘副教授。研究方向主要包括CMOS-MEMS/MEMS集成传感芯片及智能融合系统。主持和参与国家自然科学基金、HKUST-MIT超大联合项目，广东省自然科学基金，教育部海外科研合作项目，孔雀计划科研项目等多项课题。曾担任第九届亚太地区传感器与微纳米技术会议（APCOT2018）分会主席，现任IEEE电路与系统学会传感技术委员会成员。近年来，在国际重要SCI期刊IEEE TIE, TIM，TED，IEEE JMEMS,IEEE SENS J, JMM等以及顶级国际会议IEEE MEMS, IEEE Transducers和IEEE Sensors等发表论文60余篇，其中两篇JMEMS论文获选JMEMS RightNow论文奖，一篇IEEE MEMS 2020会议论文获最佳论文奖（全球仅三篇，系该国际顶级会议举办30余届以来，内地高校第二次荣获此奖项）。

主要研究方向

1. CMOS-MEMS/MEMS集成传感芯片：包括流量、加速度、惯性、温湿度、麦克风、压力传感芯片及其 ASIC接口电路

2. 柔性可穿戴智能传感器及人机交互：包括流量、压力、温湿度、汗液、热触觉等IoT系统

近五年主持科研项目

1. 深圳市基础研究重点项目 (JCYJ20220818095810023，2022/11-2025/10，200万元)

2. 国家自然科学基金青年项目 (52105582，2022/1-2024/12，30万元)

3. 广东省自然科学基金面上项目 (2020A1515011555，2019/10-2022/09，10万元）

4. 广东省自然科学基金面上项目 (2022A1515010894，2022/1-2024/12，10万元）

5. 教育部项目（202011020030, 2021/1-2021/12，5万元，结题)

6. 国家重点实验室开放课题 (DMETKF2021016, 2020-2022，8万元)

7. 深圳市基础研究面上项目 (JCYJ20210324095210030, 2021/10-2024/9，60万元)

8. 深圳市高端人才启动项目 (827-000451, 2020/1-2022/12，300万元)

9. 365游戏大厅青年教师基金 (85304-211，2018.01-2022.12，20万元)

10. 365游戏大厅教研项目 (860/000001021170，2020/10-2021/6，1万元，结题)

荣誉与奖励

· 2022，IEEE Senior Member

· 2022，IEEE电路与系统学会传感技术委员会委员

· 2022，TIM论文被《电子与封装》前沿报道

· 2021，365游戏大厅百篇优秀本科毕业论文指导老师奖

· 2020，“研材微纳杯”优秀论文征集三等奖

· 2020，365游戏大厅教师年度考核优秀

· 2020，论文被微机电领域顶刊JMEMS评为JMEMS RightNow 论文（EDS协会）

· 2020，论文获IEEE MEMS 2020最佳论文奖（领域顶会，800多篇投稿，全球仅三篇，获奖率<0.4%）

· 2018，第九届亚太地区传感器与微纳米技术会议（APCOT2018）分会主席

· 2016，论文被微机电领域顶刊JMEMS评为JMEMS RightNow 论文（EDS协会）

代表性论著

Journal Papers (*Corresponding Author, 按发表年份排列，遴选)

1. X. Wang, Z. Ke, G. Liao, X. Pan, Y. Yang, and W. Xu*, "A Fast-Response Breathing Monitoring System For Human Respiration Disease Detection," in IEEE Sensors Journal, doi: 10.1109/JSEN.2022.3167023.

2. W. Xu*, X. Wang, Z. Ke, and Y. K. Lee, “Bidirectional CMOS-MEMS Airflow Sensor with sub-mW Power Consumption and High Sensitivity,” IEEE Transactions on Industrial Electronics, vol. 69, no. 3, pp. 3183-3192, 2022.

3. Z. Fang, X. Xu, Izhar, L. Zhang, Y. Yang, and W. Xu*, “An Electrochemical Impedance-Based Flexible Flow Sensor with Ultra-Low Limit of Detection,” IEEE Sensors Journal, vol. 22, no. 2, pp. 1180-1187, 2022.

4. W. Xu*, X. Wang, B. Mousa, M. Paszkiewicz and Y. -K. Lee, “A CMOS MEMS Thermal Flow Sensor for Gas and Liquid With Parylene-C Coating,” IEEE Transactions on Electron Devices, vol. 68, no. 2, pp. 919-922, 2021.

5. W. Xu*, X. Wang, X. Zhao, Y. Yang, and Y. K. Lee, “Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process,” IEEE Transactions on Instrumentation and Measurement, vol. 70, pp. 6001309, 2021.

6. W. Xu*, X. Wang, R. Wang, J. Xu, and Y.K. Lee*, “CMOS MEMS Thermal Flow Sensor with Enhanced Sensitivity for HVAC Application,” IEEE Transactions on Industrial Electronics, vol. 68, no. 5, pp. 4468-4476, 2021.

7. W. Xu, X. Wang, X. Zhao, and Y.K. Lee, “Two-Dimensional CMOS MEMS Thermal Flow Sensor with High Sensitivity and Improved Accuracy,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 29, no. 2, pp. 248-254, 2020. (Highlighted as JMEMS RightNow Paper).

8. W. Xu, X. Wang, Y. Chiu, and Y. K. Lee, “High Sensitivity and Wide Dynamic Range Thermoresistive Micro Calorimetric Flow Sensor with CMOS MEMS Technology,” IEEE Sensors Journal, vol. 20, no. 8, pp. 4104-4111, 2020.

9. X. Wang, Y. -K. Lee, and W. Xu*, “A Fast Response and CMOS Compatible Micro Gas Flow Sensor with Thermal Feedback,” IEEE Sensors Letters, vol. 4, no. 10, 2020, Art no. 2501204.

10. W. Xu, S. Ma, X. Wang, Y. Chiu, and Y. K. Lee*, “A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 28, no. 5, pp. 841-849, 2019.

11. W. Xu*, B. Wang, M. Duan, M. Ahmed, A. Bermak, and Y. K. Lee, “A three-dimensional integrated micro calorimetric flow sensor in CMOS MEMS technology,” IEEE Sensors Letters, vol. 3, no. 2, pp. 5500104, 2019.

12. M. Ahmed#, W. Xu#, S. Mohamad, F. Boussaid, Y. K. Lee and A. Bermak, “Fully integrated bidirectional CMOS-MEMS flow sensor with low power pulse operation,” IEEE Sensors Journal, vol. 19, no. 9, pp. 3415-3424, 2019. #Co-first author.

13. W. Xu, L. Pan, B. Gao, Y. Chiu, K. Xu and Y. K. Lee*, “Systematic Study of Packaging Designs on the Performance of CMOS Thermoresistive Micro Calorimetric Flow Sensors”, Journal of Micromechanics and Microengineering, 27, 2017: 085001

14. M. Ahmed#, W. Xu#, S. Mohamad, M. Duan, Y. K. Lee and A. Bermak, “Integrated CMOS-MEMS Flow Sensor with High Sensitivity and Large Flow Range” IEEE Sensors Journal, vol. 17, no. 8, pp. 2318-2319, Apr 2017. #Co-first author.

15. W. Xu, K. Song, S. Ma, B. Gao, Y. Chiu and Y. K. Lee, “Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 25, no. 5, pp. 954-962, Oct. 2016 (Highlighted as JMEMS RightNow Paper)

Peer-reviewed Conference Papers (*Corresponding Author, 按发表年份排列，遴选)

1. Z. Li, Z. Fang, B. Wang, M. Ahmed, X. Pan, S. T. Han, X. Zhao, and W. Xu*, “System-Level Modeling and Design of a Temperature Compensated CMOS MEMS Thermal Flow Sensor,” IEEE International Symposium on Circuits and Systems (IEEE ISCAS), in press, 2022.

2. X. Xu, Z. Fang, J. Zheng, B. Gao, and W. Xu*, “Theoretical and experimental studies of electrochemical impedance based micro calorimetric flow sensor,” The 21th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021), pp. 1223-1226, 202

3. J. Zheng, X. Xu, Y. Hua, X. Zhao, and W. Xu*, “Investigation of Flexible Sweat Sensor for Sodium-Ion Concentration with a Combination of Two Sensing Mechanisms,” 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), pp. 1502-1506, 2021.

4. X. Wang, Y. Guo, X. Zhao, W. Xu*, “A Bidirectional CMOS MEMS Thermal Wall Shear Stress Sensor with Improved Sensitivity and Low Power Consumption,” IEEE 34rd International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), in press, 2021. (领域顶会，Oral)

5. Z. Fang, X. Xu, J. Zheng, L. Zhang, Y. Yang, and W. Xu*, “Micro Thermal Flow Sensor for Ion Solution Based on The Monitoring of Slope of Impedance Changes,” IEEE 34rd International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), in press, 2021. (领域顶会，Oral)

6. W. Xu*, X. Wang, X. Zhao, Z. Ke, and Y. K. Lee*, “An Integrated CMOS Mems Gas Flow Sensor with Detection Limit Towards Micrometer Per Second,” IEEE 33rd International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada, pp. 200-203, 2020. (领域顶会，评为Outstanding Paper，全球仅三篇)

7. X. Wang, X. Zhao, H. Luo, W. Xu*, and Y. K. Lee*, “A Coriolis Force Compensated Micro Thermal Convective Accelerometer with Low Crossing Effect,” IEEE 33rd International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada, pp. 255-258, 2020. (领域顶会，Oral).

8. X. Wang, W. Xu, G. Lim, and Y. K. Lee, “A Reliable Liquid-Based Highly Sensitive Micro Thermoresistive Convective Accelerometer by using 0.35µm CMOS MEMS Technology,” IEEE 33rd International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada, pp. 745-748, 2020.

9. Z. Ke, X. Wang, X. Xu, X. Cao, Izhar and W. Xu*, "A Nonlinear One-Dimensional Model of Thermoresistive Micro Calorimetric Flow Sensor for Response Time Improving," 2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS), San Diego, CA, USA, pp. 67-71, 2020. (IEEE NEMS，Oral)

10. W. Xu*, X. Wang, B. Mousa, M. Paszkiewicz, and Y. K. Lee*, “Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by using 0.35µm CMOS MEMS Technology,” in 20th International Conference on Solid-State Sensors, Actuators and Microsystem & Eurosensors XXXIII, Berlin, Germany, pp. 1827-1830, 2019. (领域顶会)

11. W. Xu, R. Wang, X. Wang, B. Mousa, and Y. K. Lee, “Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by using 0.35µm CMOS MEMS Technology,” in IEEE 32th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2019), Seoul, Korea, pp. 716-719, 2019. (领域顶会)

12. X. Wang, G. Lim, W. Xu*, and Y. K. Lee*, “Sensitivity Improvement of Micro Thermal Convective Accelerometer with Structure Optimization: Theoretical and Experimental Studies,” in IEEE Sensors, Montreal, Canada, 2019.

13. W. Xu, B. Lijin, M. Duan, X. Wang, J. Wicaksana, M. A, M. Ahmed, R. Wang, N.X. Fang, A. Bermak, and Y. K. Lee, “A Wireless Dual-Mode Micro Thermal Flow Sensor System with the Extended Flow Rang by Using 0.18μM CMOS-MEMS”, IEEE 31th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2018), Belfast, Northern Ireland, Jan 21-25, 2018. pp. 824-827. (领域顶会)

14. B. Li, W. Xu*, M. Paszkiewicz , Z. Li, R. Wang, and Y. K. Lee, “Theoretical and Experimental Study of Peclet Number Effect on the Linearity of Thermoresistive Micro Calorimetric Flow Sensors” in 9th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018), Hong Kong, China, 2018. (Session Chair)

15. W. Xu, M. Duan, M. Ahmed, S. Mohamad, A. Bermak, and Y. K. Lee, “A Low Cost Micro BTU Sensor System Fabricated by CMOS MEMS Technology”, in The 19th International Conference on Solid-State Sensors, Actuators and Microsystem (Transducers’17), Kaohsiung, Taiwan, Jun 18-22, 2017, pp. 406-409. (领域顶会, Oral)

16. W. Xu, B. Gao, M. Ahmed, M. Duan, B. Wang, S. Mohamad, A. Bermak, Y.-K. Lee, “A Wafer-Level Encapsulated CMOS MEMS Thermoresistive Calorimetric Flow Sensor with Integrated Packaging Design,” in 30th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017), Las Vegas, NV, USA, Jan. 2017, pp. 989-992. (MEMS领域顶会)

17. W. Xu, B. Gao, S. Ma, A. Zhang, Y. Chiu, and Y. K. Lee, “Low-cost Temperature-Compensated Thermoresistive Micro Calorimetric Flow (T2MCF) Sensor by Using 0.35µm CMOS MEMS Technology,” in 29th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2016), Shanghai, China, Jan. 2016, pp. 189-192. (MEMS领域顶会, Oral)

18. W. Xu, B. Gao, Y. Chiu, and Y. K. Lee, “Packaging Effect on the Flow Separation of CMOS Thermoresistive Micro Calorimetric Flow Sensors,” in 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2016), Matsushima Bay and Sendai, Japan, Apr. 2016, pp. 62-65. (IEEE NEMS, Oral)

19. W. Xu, K. Song, S. Ma, Y. Chiu, and Y.K. Lee, “One Dimensional Model of Thermoresistive Micro Calorimetric Flow Sensors for Gases and Liquids Considering Prandtl Number Effect,” in The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), San Antonio, TX, USA, Oct 26-30. 2014, pp. 2333-2335.